Laser Ablation

Critical Dimensions:

  • Substrate Size: 22″ x 22″
  • Ablation Area: 19″ x 19″

Mask (Chrome Quartz Mask):

  • 7″ x 7″ automatic alignment
  • Multiple images per mask

Laser Source:

  • 248 nm Excimer (KrF), Coherent LPX Pro 305
  • Maximum Pulse Energy: 1200 mJ
  • Maximum Rep Rate: 50 Hz
  • Pulse Width: 10-50 ns

Individual Image Specification:

  • Maximum Field Size: 50 mm diameter at substrate plane
  • Resolution: 5 microns
Homogenizer
Description
Image Size Image Area Laser Fluence
20mm x 75mm
(.79″ x 2.95″)
8mm x 30mm
0.32″ x 1.18″)
2.4 cm2
(0.37 in2)
Up to 150 mJ/cm2
28mm x 95mm
(1.10″ x 3.74″)
11mm x 38mm
(0.44″ x 1.50″)
4.2 cm2
(0.65 in2)
Up to 100 mJ/cm2

 

Substrates:

  • Film gauges up to 10-mil thickness
  • PET, Polyimide, Polycarbonate

Metalized Surfaces:

  • Cu, Au, Pt, Pd, Al, Ti, Ni, Ag
  • Typical thicknesses up to 200 nm depending on material properties such absorptivity and reflectivity and image size
  • Film costs are dependent upon metal type and coat weight.